Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6668207 | Method and system using power modulation and velocity modulation producing sputtered thin films with sub-angstrom thickness uniformity or custom thickness gradients | Claude Montcalm, James A. Folta | 2003-12-23 |
| 6524449 | Method and system for producing sputtered thin films with sub-angstrom thickness uniformity or custom thickness gradients | James A. Folta, Claude Montcalm | 2003-02-25 |