Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6624068 | Polysilicon processing using an anti-reflective dual layer hardmask for 193 nm lithography | Gautam Thakar, Cameron Gross, Eric A. Joseph | 2003-09-23 |
| 6582973 | Method for controlling a semiconductor manufacturing process | Padmanabh Krishnagiri | 2003-06-24 |