Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6624068 | Polysilicon processing using an anti-reflective dual layer hardmask for 193 nm lithography | Gautam Thakar, Reima Laaksonen, Eric A. Joseph | 2003-09-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6624068 | Polysilicon processing using an anti-reflective dual layer hardmask for 193 nm lithography | Gautam Thakar, Reima Laaksonen, Eric A. Joseph | 2003-09-23 |