Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664166 | Control of nichorme resistor temperature coefficient using RF plasma sputter etch | Chandrakant Patadia | 2003-12-16 |
| 6517235 | Using refractory metal silicidation phase transition temperature points to control and/or calibrate RTP low temperature operation | Zhong Yun Zhu, Haznita Abd Karim, Bei Chao Zhang, Johnny Cham, Ravi Sankar Yelamanchi +1 more | 2003-02-11 |