Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6517235 | Using refractory metal silicidation phase transition temperature points to control and/or calibrate RTP low temperature operation | Zhong Yun Zhu, Rajneesh Jaiswal, Bei Chao Zhang, Johnny Cham, Ravi Sankar Yelamanchi +1 more | 2003-02-11 |