Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645847 | Microelectronic interconnect material with adhesion promotion layer and fabrication method | Ajit Paranjpe, Boris Relja, Randhir Bubber, Lino Velo, Thomas R. Omstead +3 more | 2003-11-11 |
| 6627995 | Microelectronic interconnect material with adhesion promotion layer and fabrication method | Ajit Paranjpe, Boris Relja, Randhir Bubber, Lino Velo, Thomas R. Omstead +3 more | 2003-09-30 |
| 6596133 | Method and system for physically-assisted chemical-vapor deposition | Ajit Paranjpe | 2003-07-22 |
| 6592728 | Dual collimated deposition apparatus and method of use | Ajit Paranjpe, Peter V. Schwartz, Jacques Kools, Kang Song, Dorian Heimanson | 2003-07-15 |
| 6572744 | Dual collimated deposition apparatus and method of use | Ajit Paranjpe, Peter V. Schwartz, Jacques Kools, Kang Song, Dorian Heimanson | 2003-06-03 |
| 6544341 | System for fabricating a device on a substrate with a process gas | Thomas R. Omstead, Panya Wongsenakhum, William Messner, Edward J. Nagy, William Starks | 2003-04-08 |
| 6508197 | Apparatus for dispensing gas for fabricating substrates | Thomas R. Omstead, Panya Wongsenakhum, William Messner, Edward J. Nagy, William Starks | 2003-01-21 |
| 6508885 | Edge sealing structure for substrate in low-pressure processing environment | Cecil J. Davis | 2003-01-21 |