Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6544341 | System for fabricating a device on a substrate with a process gas | Thomas R. Omstead, Panya Wongsenakhum, Edward J. Nagy, William Starks, Mehrdad M. Moslehi | 2003-04-08 |
| 6508197 | Apparatus for dispensing gas for fabricating substrates | Thomas R. Omstead, Panya Wongsenakhum, Edward J. Nagy, William Starks, Mehrdad M. Moslehi | 2003-01-21 |