Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620335 | Plasma etch reactor and method | Leslie G. Jerde, Alferd Cofer, Robert C. Vail, Kurt A. Olson | 2003-09-16 |
| 6521081 | Deposition shield for a plasma reactor | Robert Ditizio | 2003-02-18 |