Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620335 | Plasma etch reactor and method | Stephen P. DeOrnellas, Alferd Cofer, Robert C. Vail, Kurt A. Olson | 2003-09-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620335 | Plasma etch reactor and method | Stephen P. DeOrnellas, Alferd Cofer, Robert C. Vail, Kurt A. Olson | 2003-09-16 |