Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635580 | Apparatus and method for controlling wafer temperature in a plasma etcher | R. Y. Yang | 2003-10-21 |
TC
T. Chen
Overall (2003): #111,400 of 273,478Top 45%
1
Patents 2003