R. Y. Yang

TSMC: 1 patents #218 of 754Top 30%

Overall (2003): #81,016 of 273,478Top 30%

Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #	Title	Co-Inventors	Date
6635580	Apparatus and method for controlling wafer temperature in a plasma etcher	T. Chen	2003-10-21