Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660653 | Dual trench alternating phase shift mask fabrication | Chang-Ming Dai, Ching-Hsing Chang | 2003-12-09 |
| 6632590 | Enhance the process window of memory cell line/space dense pattern in sub-wavelength process | Tsung-Hou Lee, Chih-Hsiung Lee, Gwo-Yuh Shiau, Ching-Sen Kuo | 2003-10-14 |
| 6630408 | Self alignment process to fabricate attenuated shifting mask with chrome border | Ching-Chia Lin | 2003-10-07 |
| 6631307 | Use of logical operations in place of OPC software | Yi-Hsu Chen | 2003-10-07 |