Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660653 | Dual trench alternating phase shift mask fabrication | San-De Tzu, Ching-Hsing Chang | 2003-12-09 |
CD
Chang-Ming Dai
Overall (2003): #250,906 of 273,478Top 95%
1
Patents 2003