Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635579 | Operating method of a semiconductor etcher | Shin-Yi Tsai, Hsu-Sheng Yu, Chun-Hung Lee | 2003-10-21 |
| 6601596 | Apparatus for cleaning a wafer with shearing stress from slab with curved portion | Shin-Yi Tsai | 2003-08-05 |
| 6573177 | Protection layer to prevent under-layer damage during deposition | Stefan Tsai, Chai-Chi Chung | 2003-06-03 |
| 6511902 | Fabrication method for forming rounded corner of contact window and via by two-step light etching technique | Shin-Yi Tsai | 2003-01-28 |