Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635579 | Operating method of a semiconductor etcher | Ming-Chung Liang, Hsu-Sheng Yu, Chun-Hung Lee | 2003-10-21 |
| 6601596 | Apparatus for cleaning a wafer with shearing stress from slab with curved portion | Ming-Chung Liang | 2003-08-05 |
| 6511902 | Fabrication method for forming rounded corner of contact window and via by two-step light etching technique | Ming-Chung Liang | 2003-01-28 |