Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649538 | Method for plasma treating and plasma nitriding gate oxides | Tze-Liang Lee | 2003-11-18 |
| 6638866 | Chemical-mechanical polishing (CMP) process for shallow trench isolation | Kevin Su | 2003-10-28 |
| 6541382 | Lining and corner rounding method for shallow trench isolation | Syun-Ming Jang | 2003-04-01 |