Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6576543 | Method for selectively depositing diffusion barriers | Shau-Lin Shue | 2003-06-10 |
| 6551915 | Thermal annealing/hydrogen containing plasma method for forming structurally stable low contact resistance damascene conductor structure | Shau-Lin Shue | 2003-04-22 |