Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6652666 | Wet dip method for photoresist and polymer stripping without buffer treatment step | Chen-Hsi Shih, Dian-Hau Chen, Gau-Ming Lu, Cho-Ching Chen | 2003-11-25 |
| 6583062 | Method of improving an aspect ratio while avoiding etch stop | Tsung-Chuan Chen, Shew-Tsu Hsu | 2003-06-24 |
| 6570257 | IMD film composition for dual damascene process | Dian-Hau Chen, Hsiang-Tan Lee | 2003-05-27 |