Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660630 | Method for forming a tapered dual damascene via portion with improved performance | Yu-Chun Huang | 2003-12-09 |
| 6642153 | Method for avoiding unetched polymer residue in anisotropically etched semiconductor features | Yu-Chun Huang | 2003-11-04 |