Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660630 | Method for forming a tapered dual damascene via portion with improved performance | Chih-Fu Chang | 2003-12-09 |
| 6642153 | Method for avoiding unetched polymer residue in anisotropically etched semiconductor features | Chih-Fu Chang | 2003-11-04 |
| 6593232 | Plasma etch method with enhanced endpoint detection | Tsung Chuan, Albert Chen | 2003-07-15 |