Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6547939 | Adjustable shadow mask for improving uniformity of film deposition using multiple monitoring points along radius of substrate | Paul Hsueh, Shyang-Jye Chang, Hans Schiesser, Michael Ma, Jack Hsu | 2003-04-15 |
| 6542671 | Integrated 3-dimensional multi-layer thin-film optical couplers and attenuators | Tzu-Yih Chu | 2003-04-01 |
| 6522462 | All optical logic using cross-phase modulation amplifiers and mach-zehnder interferometers with phase-shift devices | Tzu-Yih Chu, Shyang-Jye Chang, Chi Au | 2003-02-18 |