Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6547939 | Adjustable shadow mask for improving uniformity of film deposition using multiple monitoring points along radius of substrate | Paul Hsueh, Shyang-Jye Chang, Michael Ma, Jack Hsu, Abraham C. Ma | 2003-04-15 |