Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6668202 | Position control system and velocity control system for stage driving mechanism | Kenichi Makino, Masayuki Yamamoto | 2003-12-23 |
| 6644584 | Single coil of coil unit for linear motor, method and device for winding and forming the same, and method for forming and fabricating coil unit | Hidehiko Mori, Yasushi Koyanagawa | 2003-11-11 |
| 6584367 | Stage position control method and stage position control apparatus capable of improving positioning precision | Kenichi Makino, Hidehiko Mori | 2003-06-24 |
| 6564110 | Position controlling apparatus capable of reducing the effect of disturbance | Kenichi Makino, Hidehiko Mori | 2003-05-13 |