Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6668202 | Position control system and velocity control system for stage driving mechanism | Masayuki Yamamoto, Yoshiyuki Tomita | 2003-12-23 |
| 6593872 | Signal processing apparatus and method, signal coding apparatus and method, and signal decoding apparatus and method | Jun Matsumoto | 2003-07-15 |
| 6584367 | Stage position control method and stage position control apparatus capable of improving positioning precision | Yoshiyuki Tomita, Hidehiko Mori | 2003-06-24 |
| 6564110 | Position controlling apparatus capable of reducing the effect of disturbance | Yoshiyuki Tomita, Hidehiko Mori | 2003-05-13 |