Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667185 | Method of fabricating nitride semiconductor device | Akihiko Ishibashi, Isao Kidoguchi, Kenji Harafuji | 2003-12-23 |
| 6614059 | Semiconductor light-emitting device with quantum well | Ayumu Tsujimura, Yoshiaki Hasegawa, Akihiko Ishibashi, Isao Kidoguchi, Masakatsu Suzuki | 2003-09-02 |
| 6611005 | Method for producing semiconductor and semiconductor laser device | Ayumu Tsujimura, Yoshiaki Hasegawa, Akihiko Ishibashi, Isao Kidoguchi | 2003-08-26 |
| 6586774 | Method for fabricating nitride semiconductor, method for fabricating nitride semiconductor device, and nitride semiconductor device | Akihiko Ishibashi, Ayumu Tsujimura, Yoshiaki Hasegawa, Nobuyuki Otsuka, Gaku Sugahara +4 more | 2003-07-01 |
| 6562129 | Formation method for semiconductor layer | Yoshiaki Hasegawa, Ayumu Tsujimura, Isao Kidoguchi | 2003-05-13 |
| 6544869 | Method and apparatus for depositing semiconductor film and method for fabricating semiconductor device | Kenji Harafuji, Akihiko Ishibashi, Kiyoshi Ohnaka | 2003-04-08 |
| 6518082 | Method for fabricating nitride semiconductor device | Isao Kidoguchi, Akihiko Ishibashi, Masahiro Kume, Satoshi Kamiyama | 2003-02-11 |