Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667185 | Method of fabricating nitride semiconductor device | Akihiko Ishibashi, Isao Kidoguchi, Yuzaburo Ban | 2003-12-23 |
| 6586774 | Method for fabricating nitride semiconductor, method for fabricating nitride semiconductor device, and nitride semiconductor device | Akihiko Ishibashi, Ayumu Tsujimura, Yoshiaki Hasegawa, Nobuyuki Otsuka, Gaku Sugahara +4 more | 2003-07-01 |
| 6544869 | Method and apparatus for depositing semiconductor film and method for fabricating semiconductor device | Akihiko Ishibashi, Yuzaburo Ban, Kiyoshi Ohnaka | 2003-04-08 |