Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6666577 | Method for predicting temperature, test wafer for use in temperature prediction, and method for evaluating lamp heating system | Satoshi Shibata | 2003-12-23 |
| 6616331 | Method for predicting temperature and test wafer for use in temperature prediction | Satoshi Shibata | 2003-09-09 |