Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6666577 | Method for predicting temperature, test wafer for use in temperature prediction, and method for evaluating lamp heating system | Yuko Nambu | 2003-12-23 |
| 6619939 | Rotary pump | Umeo Inoue, Hiroyuki Kishida | 2003-09-16 |
| 6616331 | Method for predicting temperature and test wafer for use in temperature prediction | Yuko Nambu | 2003-09-09 |