TO

Tadayoshi Okuya

SC Speedfam Co.: 1 patents #1 of 10Top 10%
Overall (2003): #108,950 of 273,478Top 40%
1
Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6649528 Local dry etching method Michihiko Yanagisawa 2003-11-18