MY

Michihiko Yanagisawa

SC Speedfam Co.: 1 patents #1 of 10Top 10%
📍 Ayase, JP: #9 of 39 inventorsTop 25%
Overall (2003): #153,211 of 273,478Top 60%
1
Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6649528 Local dry etching method Tadayoshi Okuya 2003-11-18