Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6538723 | SCANNING EXPOSURE IN WHICH AN OBJECT AND PULSED LIGHT ARE MOVED RELATIVELY, EXPOSING A SUBSTRATE BY PROJECTING A PATTERN ON A MASK ONTO THE SUBSTRATE WITH PULSED LIGHT FROM A LIGHT SOURCE, LIGHT SOURCES THEREFOR, AND METHODS OF MANUFACTURING | Shigeru Hagiwara | 2003-03-25 |