Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583857 | Exposure apparatus and its making method, and device manufacturing method | — | 2003-06-24 |
| 6538723 | SCANNING EXPOSURE IN WHICH AN OBJECT AND PULSED LIGHT ARE MOVED RELATIVELY, EXPOSING A SUBSTRATE BY PROJECTING A PATTERN ON A MASK ONTO THE SUBSTRATE WITH PULSED LIGHT FROM A LIGHT SOURCE, LIGHT SOURCES THEREFOR, AND METHODS OF MANUFACTURING | Ken Ozawa | 2003-03-25 |