Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664636 | Cu film deposition equipment of semiconductor device | Sung Pyo | 2003-12-16 |
| 6645858 | Method of catalyzing copper deposition in a damascene structure by plasma treating the barrier layer and then applying a catalyst such as iodine or iodine compounds to the barrier layer | Sung Gyu Pyo | 2003-11-11 |