Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6630740 | Semiconductor device | Nobuyoshi Awaya | 2003-10-07 |
| 6511908 | Method of manufacturing a dual damascene structure using boron nitride as trench etching stop film | Takao Kinoshita | 2003-01-28 |