Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6511908 | Method of manufacturing a dual damascene structure using boron nitride as trench etching stop film | Kunihiko Orita | 2003-01-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6511908 | Method of manufacturing a dual damascene structure using boron nitride as trench etching stop film | Kunihiko Orita | 2003-01-28 |