Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6597193 | Steady state method for measuring the thickness and the capacitance of ultra thin dielectric in the presence of substantial leakage current | Jacek Lagowski, Alexander Savtchouk | 2003-07-22 |
| 6569691 | Measurement of different mobile ion concentrations in the oxide layer of a semiconductor wafer | Lubomir L. Jastrzebski, Alexander Savtchouk | 2003-05-27 |
| 6538462 | Method for measuring stress induced leakage current and gate dielectric integrity using corona discharge | Jacek Lagowski, Alexander Savtchouk | 2003-03-25 |