Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667551 | Semiconductor device and manufacturing thereof, including a through-hole with a wider intermediate cavity | Terunao Hanaoka, Kenji Wada, Nobuaki Hashimoto, Haruki Ito, Kazushige Umetsu | 2003-12-23 |