Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667551 | Semiconductor device and manufacturing thereof, including a through-hole with a wider intermediate cavity | Terunao Hanaoka, Nobuaki Hashimoto, Haruki Ito, Kazushige Umetsu, Fumiaki Matsushima | 2003-12-23 |
| 6521826 | Thin film solar cell and fabrication method therefor | — | 2003-02-18 |
| 6512171 | Thin film solar cell | Takashi Inamasu, Masafumi Shimizu | 2003-01-28 |