Issued Patents 2003
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669777 | Method of producing a high resistivity silicon wafer utilizing heat treatment that occurs during device fabrication | Oleg Kononchuk, Zbigniew J. Radzimski, Neil A. Weaver | 2003-12-30 |
| 6669775 | High resistivity silicon wafer produced by a controlled pull rate czochralski method | Oleg Kononchuk, Zbigniew J. Radzimski, Neil A. Weaver | 2003-12-30 |
| 6649427 | Method for evaluating impurity concentrations in epitaxial susceptors | Douglas G. Anderson | 2003-11-18 |
| 6632688 | Method for evaluating impurity concentrations in epitaxial reagent gases | — | 2003-10-14 |
| 6630363 | Method for evaluating impurity concentrations in unpolished wafers grown by the Czochralski method | Douglas G. Anderson | 2003-10-07 |
| 6620632 | Method for evaluating impurity concentrations in semiconductor substrates | Craig Rein | 2003-09-16 |
| 6583024 | High resistivity silicon wafer with thick epitaxial layer and method of producing same | Oleg Kononchuk, Zbigniew J. Radzimski, Neil A. Weaver | 2003-06-24 |
| 6576501 | Double side polished wafers having external gettering sites, and method of producing same | David Beauchaine, Timothy L. Brown, Romony San | 2003-06-10 |
| 6565652 | High resistivity silicon wafer and method of producing same using the magnetic field Czochralski method | Oleg Kononchuk, Zbigniew J. Radzimski, Neil A. Weaver | 2003-05-20 |