Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6592939 | System for and method of using developer as a solvent to spread photoresist faster and reduce photoresist consumption | — | 2003-07-15 |
| 6514874 | Method of using controlled resist footing on silicon nitride substrate for smaller spacing of integrated circuit device features | Bhanwar Singh, Angela T. Hui | 2003-02-04 |