Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613151 | Single disc vapor lubrication | Michael Joseph Stirniman | 2003-09-02 |
| 6605195 | Multi-layer deposition process using four ring sputter sources | — | 2003-08-12 |
| 6582572 | Target fabrication method for cylindrical cathodes | — | 2003-06-24 |
| 6569294 | Sputtering target assembly and method for depositing a thickness gradient layer with narrow transition zone | Alexander Boris Khazanov, Shanghsien Rou, Jie Yu, Mark A. Shows, Kuo Hsing Hwang +1 more | 2003-05-27 |
| 6511702 | Apparatus and method to control the molecular weight distribution of a vapor | Michael Joseph Stirniman, Yuh Cheng | 2003-01-28 |