Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6569294 | Sputtering target assembly and method for depositing a thickness gradient layer with narrow transition zone | Alexander Boris Khazanov, Shanghsien Rou, Jie Yu, Paul Stephen McLeod, Kuo Hsing Hwang +1 more | 2003-05-27 |
| 6526909 | Biased ion beam deposition of high density carbon | Kevin J. Grannen, Jeffrey A. McCann, Xiaoding Ma, Jing Gui | 2003-03-04 |