Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6607955 | Method of forming self-aligned contacts in a semiconductor device | — | 2003-08-19 |
| 6607983 | Method of processing a defect source at a wafer edge region in a semiconductor manufacturing | Kwang-youl Chun, Yun-Jae Lee, Won-seong Lee, Jeong-Hoon Oh | 2003-08-19 |
| 6602773 | Methods of fabricating semiconductor devices having protected plug contacts and upper interconnections | Yoon-Soon Chun | 2003-08-05 |
| 6518624 | Trench-gate power semiconductor device preventing latch-up and method for fabricating the same | Hyun-Chul Kim, Chong-man Yun, Ju-Il Kim | 2003-02-11 |