Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670268 | Metal interconnection with low resistance in a semiconductor device and a method of forming the same | In-Sun Park | 2003-12-30 |
| 6623798 | Chemical vapor deposition method for depositing silicide and apparatus for performing the same | In-Sun Park, Young-Cheon Kim, Chul Whang-Bo, Hyeon-Deok Lee | 2003-09-23 |