Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6623798 | Chemical vapor deposition method for depositing silicide and apparatus for performing the same | Ju-Cheol Shin, In-Sun Park, Young-Cheon Kim, Hyeon-Deok Lee | 2003-09-23 |