Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6630834 | Apparatus and method for measuring change in capacitance | Dong-ki Min | 2003-10-07 |
| 6563249 | Rotary microactuator having optimally curved electrodes | Sunghwan Jung, Jae-Joon Choi | 2003-05-13 |
| 6521921 | Scanning probe microscope (SPM) probe having field effect transistor channel and method of fabricating the same | Geunbae Lim, Yukeun Eugene Pak, Hyunjung Shin, Young Kuk | 2003-02-18 |
| 6515489 | Apparatus for sensing position of electrostatic XY-stage through time-division multiplexing | Dong-ki Min, Cheol-soon Kim | 2003-02-04 |
| 6512313 | Electromagnetic X-Y stage driver for nano data storage system and method for fabricating coils of the same | Jae-Joon Choi, Kyu-yong Kim, Hong-sik Park, Chang-Su Park | 2003-01-28 |
| 6509670 | Single stage microactuator for multidimensional actuation with multi-folded spring | Hee-moon Jeong | 2003-01-21 |