Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6515489 | Apparatus for sensing position of electrostatic XY-stage through time-division multiplexing | Dong-ki Min, Jong Up Jeon | 2003-02-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6515489 | Apparatus for sensing position of electrostatic XY-stage through time-division multiplexing | Dong-ki Min, Jong Up Jeon | 2003-02-04 |