Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660822 | Method for forming insulating film between interconnect layers in microelectronic devices | Yi-Yeol Lyu, Jin Heong Yim, Sang-kook Mah, Eun Ju Nah, Il Sun Hwang +1 more | 2003-12-09 |