Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660822 | Method for forming insulating film between interconnect layers in microelectronic devices | Yi-Yeol Lyu, Jin Heong Yim, Sang-kook Mah, Eun Ju Nah, Hyun Dam Jeong +1 more | 2003-12-09 |
| 6632748 | Composition for preparing substances having nano-pores | Jin Heong Yim, Yi-Yeol Lyu, Sang-kook Mah, Eun Ju Nah, Keun Yoon | 2003-10-14 |
| 6623711 | Siloxane-based resin and method for forming insulating film between interconnect layers in semiconductor devices by using the same | Yi-Yeol Lyu, Jin Heong Yim, Sang-kook Mah, Eun Ju Nah, Hyun Dam Jeong +1 more | 2003-09-23 |