Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6612174 | Optical pressure sensor | Charles R. Willcox, Stanley E. Rud, Jr. | 2003-09-02 |
| 6561038 | Sensor with fluid isolation barrier | James L. Gravel, David A. Broden | 2003-05-13 |
| 6520020 | Method and apparatus for a direct bonded isolated pressure sensor | Mark A. Lutz, Roger L. Frick, Adrian C. Toy | 2003-02-18 |
| 6516671 | Grain growth of electrical interconnection for microelectromechanical systems (MEMS) | Mark G. Romo, Stanley E. Rud, Jr., Mark A. Lutz, Adrian C. Toy | 2003-02-11 |
| 6508129 | Pressure sensor capsule with improved isolation | — | 2003-01-21 |